VisiTec Microtechnik(德國)

VisiTec Microtechnik

德國VisiTecMicrotechnik www.visitec-em.de德國Visitec捷高公司的超大試樣室Mira型掃描電鏡。•被檢物的尺寸可為直徑700mm，高600mm，長1400mm，重量可達300公斤，真空室長1400，寬1100和高1200mm。•分辨本領4nm，加速電壓0.3kV—20kV。•是一種新的計算機控制、非破壞性的檢查分析測 試裝置，可用于工業產品的生產，質量管理，微機加工和工藝品的檢查研究等。VisiTecMicrotechnikGmbHisaninnovativemedium-sizedenterprise.ItsmainpurposeistodevelopandproduceMIRA,theLargeChamberScanningElectronMicroscopes(LC-SEM).Astheworld’slargestoneofitskind,itisusedinvariouscasessinceitwaspresentedin1995.MoreoverVisiTecspecializesinvacuumtechnologyandinnon-destructiveanalysis.Variousdetectorsareavailablefordifferentneeds.InparticulartheFIBandtheFTIRofferaveryaccurateanalysisofsurfaces,eveninmoleculardimensions.Mostly,theLC-SEMisusuallyappliedinResearchandDevelopment.HistoryThecompanywasfoundedbydirectorMartinKleinin1994inGrevesmu