技術參數：
In consideration of the presently available experience with several set ups constructed for research institutes and industrial companies, the following specifications can be expected (deuterium lamp with low operation time):

波長范圍 115 nm 至 230 nm 單燈
115 nm 至 230 nm 加 160 nm 至 320 nm，雙燈
光譜分辨率 < 1 nm （160nm 譜線的半高全寬度FWHM ）
重現性 < 0.1 nm，在160 nm 和 121.5 nm 處獲得驗證
工作壓力 < 1×10-5 毫巴。實踐證明這是測量的值

測量
透過率 <0.3%
反射率 <0.5%
Transmittance out of band <0.1%
Scattered Reflectance >0.001% 157nm
Reproducability
157nm
Diffuse Reflectance <5% 157nm
Scattered Reflectance <5% 157nm
(@ aperture of 1mm in front of PMT , wavelength dependent



主要特點：
The UV/VUV - spectrophotometer system is a product of more than twenty years of research in the field of production and testing of advanced optical components for UV/VUV spectral range. The current system is based on a prototype spectrophotometer of the Laser Zentrum Hannover e.V., which was initially developed for typical analytical tasks in optical thin film technology. During the production phase of more than ten units for industrial companies and research institutes, the measurement performance of the system could be improved to an outstanding level, which qualifies the spectrophotometer in routine quality management and research applications.